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Wafer

Quartz Wafer
Quartz wafer는 높은 작업온도, 높은 항부식, 양호한 열전도율, 높은 광투과율과 같은 많은 독특한 특징을 가지고 있으며,
이 특징들은 Quartz 웨이퍼를 반도체, 포토마스크, 마이크로파 필터, 광섬유 응용에 사용되고 있다.

Quartz Wafer Available

High working temperature High optical transmission
High stability High anti corrosion
Good thermal conductivity low dielectric loss
Stable dielectric constant Superior mechanical properties

What's differences ?

Fused silica wafer ( Synthetic silica ) Fused quartz wafer ( Natual silica )
High OH content >1200 Low OH content > 150
Higher transmission in the UV range Lower transmission in the UV range
Free bubbles and inclusions Contain bubbles and inclusions
Very low fluorescence High fluorescence
Impurity 5 ppm Impurity 20 ~ 40 ppm

Quartz Wafer Properties

Chemical formula SiO2
Mechanical Properties
Density 2.2 g / cm3
Poisson's ratio 0.14 ~ 0.17
Young's modulus 72000 Mpa
Rigidity modulus 31000 Mpa
Moh's hardness 5.5 ~ 6.5
Thermal Properties
Transformation point 1120 °C
Softening point 1680 °C
Specific heat ( 20 ~ 350 °C ) 670 J / kg °C
Thermal conductivity ( 20 °C ) 1.4 W / m °C
Thermal expansion coefficient 5.5×10 -7 cm / cm °C
Electrical Properties
Resistivity 7E7 ohm-cm
Insulating strength 250 ~ 400 Kv / cm
Dielectric constant e 3.7~ 3.9
Dielectric absorption coefficient. < 4E4
Dielectric waste coefficient. < 1E4
Optical Properties
Refractive index ( @ 589 nm ) Nd =1.4584

Product Specification

Growth CVD / Oxy-Hydrogen melting / electric melting
Diameter Ø 1" / Ø 2" / Ø 3" / Ø 4"/ Ø 6" / Ø 8"/ Ø 12"
Size 10 x 10 / 20 x 20 / 50 x 50 / 100 x 100 / 200 x 200 mm
Thickness 0.4 mm / 0.5 mm / 0.7 mm / 1 mm
Surface one side polished / two sides polished
Flat SEMI.Std. flat or Notch
TTV <= 15 um
Roughness Ra <= 10 A
Package Ampak cassette / jar